Friday, 23th September 2016 Atom Probe Tomography

In the 15 years since the introduction of the first commercially available Atom Probe Tomography (APT) instruments the improvements in the capability of the technique have been quite remarkable. While still maintaining the unique capability to detect, identify and position individual atoms with near atomic resolutions in three dimensions, analysis volumes have increased dramatically, improved detector performance and mass resolving power have produced real enhancements in detection sensitivities, compositional accuracy and precision, and the widespread use of laser mode has enabled analysis of many material systems beyond traditional bulk metals. In addition, the maturation of FIB-based specimen preparation methods has made site-specific analyses truly routine. This seminar will provide an overview of APT technology and the latest innovations and will include a broad range of applications ranging from metals, semiconductor device structures analysis to bio minerals and geological characterization,incorporating synergies with correlative analysis techniques.
 

• Evolution of Atom Probe instrumentation

• Operating principle with high voltage and laser pulsing

• Data analysis techniques

• 3D quantitative metrology to complement SIMS,

EPMA and TEM/STEM

II. Applications

• Metal and advanced materials

• General oxides and ceramics

• Nanoparticles

• Geological minerals

III. Sample preparation

• Specimen requirements for APT

• Electro-polishing for metal

• Site-specific FIB lift-out method

• Microtips™ in the LEAP®

IV. New generation of Pre-Aligned Electrode